Concave microlens arrays through an etching-assisted laser seeding method
نویسندگان
چکیده
منابع مشابه
Strain responsive concave and convex microlens arrays
We report the fabrication of single-component, strain responsive microlens arrays with real-time tunability. The concave lens array is fabricated by patterning hard oxide layer on a bidirectionally prestretched soft elastomer, polydimethylsiloxane PDMS followed by confined buckling upon release of the prestrain. The convex microlens array is replica molded from the concave lenses in PDMS. Due t...
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‡Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA E-mail: [email protected] Microlenses are important optical components that image, detect, and couple light. But most synthetic microlenses have fixed position and shape once they are fabricated, so their possible range of tunability and complexity is rather limited. By comparison, biology provides many...
متن کاملTwo step process for the fabrication of diffraction limited concave microlens arrays.
A two step process has been developed for the fabrication of diffraction limited concave microlens arrays. The process is based on the photoresist filling of melted holes obtained by a preliminary photolithography step. The quality of these microlenses has been tested in a Mach-Zehnder interferometer. The method allows the fabrication of concave microlens arrays with diffraction limited optical...
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Department of Physics and Materials Scien Chee Avenue, Kowloon Tong, Kowloon, Hon Department of Biology and Chemistry, Cit Avenue, Kowloon Tong, Kowloon, Hong Kon Centre for Functional Photonics (CFP), Cit Avenue, Kowloon Tong, Kowloon, Hong Kon Shenzhen Research Institute, City Universit † Electronic supplementary informa 10.1039/c4ra06172a ‡ These authors contributed equally to th Cite this: ...
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ژورنال
عنوان ژورنال: SCIENTIA SINICA Physica, Mechanica & Astronomica
سال: 2020
ISSN: 1674-7275
DOI: 10.1360/sspma-2020-0142